Thin Film Equipment

Products / Production

TF Series

The TF series is a versatile platform with large chamber options that can accommodate any deposition source. It is a highly customizable single-chamber platform suitable for a wide range of laboratory and industrial applications.

Features

    Wide range of chambers from 500 mm to 1400 mm
    Advance PC based software control
    Process data logging
    Supports multiple deposition processes
    Available with load lock
    Optimized distribution-masks for high rates and uniformity
    Compatible with new or existing glove box units
    Clean room compatibility