The CT series combines multiple PVD and CVD process capabilities in the same run to fabricate multilayer stacks and device architectures. Each module can be configured individually to meet your technological requirements, while also being extendable for future expansion.
Modular design with up to 5 process chambers
PC/PLC controlled recipes for single, batch, or automated processes
Manual or automated substrate transfer
Advanced data logging and process tracking
Sample heating, cooling, bias, and cleaning options