ATS Series

ATS 500

The ATS Series are mid sized coaters for production and large wafer Rand D applications. The ATS 500 is clean room compatible and offers high throughput efficiency and a source to substrate distance of up to 20” .

Glove Box Series

GBIC

The glove box integrated coaters is a combinatorial system of vacuum coaters and glove box enabling end to end processing of samples under controlled atmospheres.