ATS Series
ATS 500
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The ATS Series are mid sized coaters for production and large wafer Rand D applications. The ATS 500 is clean room compatible and offers high throughput efficiency and a source to substrate distance of up to 20” .
Glove Box Series
GBIC
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The glove box integrated coaters is a combinatorial system of vacuum coaters and glove box enabling end to end processing of samples under controlled atmospheres.