The glove box integrated coaters (GBIC) is a combinatorial system of vacuum coaters and glove box enabling end to end processing of samples under controlled atmospheres. These coaters find extensive application in the area of organic electronics, solar cells and hybrids of organic and inorganic materials.
Modular segmentation of system components
Full integrated process control with recipe control software management
Direct access to process equipment via front sliding door
In-situ mask change-over options
Convenient and interlocked service access via back side hinged door