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- Bench Top Coaters BT150,BT300
Bench Top Coaters BT150,BT300
Deposition tools for SEM and TEM sample preparation, plus R&D applications


BT150 for SEM and TEM sample preparation
Dual head sputter source Single head sputtering Single head sputter source Carbon rod source
- Dual DC sputter sources for sequential metal sputter deposition on samples
- Triple DC sputter sources for metal deposition on samples up to 200mm diameter
- 100mm and 150mm diameter rotary substrate stages, 200mm diameter planetary stage
- Choice of rotary pump, dry scroll pump and turbo pumping systems
- Extended chamber height options

12m3 two-stage rotary pump |
12m3 two-stage rotary pump |
12m3 two-stage rotary pump |
Details
- Features
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Ease of operation
Full colour, high resolution, touch screen control system
Recipe storage and editing for up to 30 processes
Process data output to mass storage device or PC
Optional integrated film thickness monitoring system
Complete range of deposition techniques
Carbon fibre and carbon rod techniques for TEM
Glow discharge accessory for hydrophilic surface modification of carbon films for TEM
Noble metals sputtering techniques for SEMS
putter deposition of metals such as aluminium for R&D (requires turbo pump option)
Resistance source option for metals deposition for EM and R&D
Automatic shutter options
A comprehensive range of sample stages
Water cooled SEM stage with bias operation
Rotary SEM stage
Planetary SEM stage
Rotary stage for R&D (BT150)
Rotary and planetary stages for R&D up to 8” / 200mm diameter (BT300)
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